電子級(jí)多晶硅是制造半導(dǎo)體芯片和大規(guī)模集成電路最基礎(chǔ)的材料,對(duì)我國(guó)電子、信息和國(guó)家安全領(lǐng)域具有重大意義。電子級(jí)多晶硅對(duì)產(chǎn)品純度、雜質(zhì)控制的要求非常苛刻,其主要影響因素是兩種原料即三氯氫硅和循環(huán)氫氣的純度。
浩瀚色譜（山東）應(yīng)用技術(shù)開發(fā)有限公司，采用DC550填充柱氣相色譜法測(cè)定多晶硅生產(chǎn)用氫氣中磷化氫，三氯化磷，三氯氧磷含量，利用涂層的采樣鋼瓶進(jìn)行采集多晶硅生產(chǎn)用氫氣，F(xiàn)PD火焰光度檢測(cè)器檢測(cè)樣品氣體中磷化物的含量，取樣時(shí)間短，降低雜質(zhì)的引入，得到的樣品氣體代表性好，提高工作效率。
名稱:17.5%DC-550不銹鋼填充柱
規(guī)格:3m*1/8
*高使用溫度:240°C
適用于:島津GC-14C，GC-2010，GC-2014，GC-2030
標(biāo)準(zhǔn):多晶硅用氫氣中磷雜質(zhì)的測(cè)定氣相色譜法
Electronic grade polycrystalline silicon is the most fundamental material for manufacturing semiconductor chips and large-scale integrated circuits, and has significant implications for China's electronics, information, and national security fields. The requirements for product purity and impurity control of electronic grade polycrystalline silicon are very strict, and the main influencing factors are the purity of two raw materials, namely trichlorosilane and recycled hydrogen gas.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. uses DC550 packed column gas chromatography to determine the content of phosphine, phosphorus trichloride, and phosphorus trichloride in hydrogen gas used in polycrystalline silicon production. A coated sampling cylinder is used to collect hydrogen gas used in polycrystalline silicon production, and an FPD flame photometric detector is used to detect the content of phosphides in the sample gas. The sampling time is short, the introduction of impurities is reduced, and the obtained sample gas has good representativeness and improves work efficiency.
Name: 17.5% DC-550 Stainless Steel Filled Column
Specification: 3m * 1/8
*High operating temperature: 240 ° C
Applicable to: Shimadzu GC-14C, GC-2010，GC-2014，GC-2030
Standard: Determination of phosphorus impurities in hydrogen gas for polycrystalline silicon by gas chromatography